Browsing by author "Ghinovker, M."
Now showing items 1-3 of 3
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Characterization of overlay mark fidelity
Adel, M.; Ghinovker, M.; Poplawski, J.M.; Kassel, E.; Izikson, P.; Pollentier, Ivan; Leray, Philippe; Laidler, David (2003) -
Moiré effect-based Overlay target design for OPO improvements
Van Den Heuvel, Dieter; Leray, Philippe; Hajaj, E.; Shaphirov, D.; Ashwal, E.; Dror, C.; Yohanan, R.; Ghinovker, M.; Gordon, K.; Liu, Z.; Liu, X.; Gronheid, Roel; Spielberg, H. (2021) -
Thinking outside the box for improved overlay metrology
Pollentier, Ivan; Leray, Philippe; Laidler, David; Adel, M.; Ghinovker, M.; Poplawski, J.; Kassel, E.; Izikson, P. (2003)