Browsing by author "Lee, Sung-Gyu"
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Molecular modeling of EUV photoresist revealing the effect of chain conformation on line edge roughness formation
Park, Juhae; Lee, Sung-Gyu; Vesters, Yannick; Severi, Joren; Myungwoong, Kim; De Simone, Danilo; Oh, Hye-Keun; Hur, Su-Mi (2019)