Authors

Park, Juhae; Lee, Sung-Gyu; Vesters, Yannick; Severi, Joren; Myungwoong, Kim; De Simone, Danilo; Oh, Hye-Keun; Hur, Su-Mi

ISSN

2073-4360

Issue

12

Journal

Polymers

Volume

11

Title

Molecular modeling of EUV photoresist revealing the effect of chain conformation on line edge roughness formation

Publication type

Journal article