Publication:
Molecular modeling of EUV photoresist revealing the effect of chain conformation on line edge roughness formation
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1901 since deposited on 2021-10-27
2last month
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Acq. date: 2026-01-08
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Views
1901 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-01-08
Citations