Browsing by author "Su, Irene"
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EUV modeling accruracy and integration requirements for the 16nm node
Zavyalova, Lena; Su, Irene; Jang, Stephen; Cobb, Jonathan; Ward, Brian; Sorensen, Jacob; Song, Hua; Gao, Weimin; Lucas, Kevin; Lorusso, Gian; Hendrickx, Eric (2010)