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    • Compositional depth profiling of TaCN thin films 

      Adelmann, Christoph; Conard, Thierry; Franquet, Alexis; Brijs, Bert; Munnik, Frans; Burgess, Simon; Witters, Thomas; Meersschaut, Johan; Kittl, Jorge; Vandervorst, Wilfried; Van Elshocht, Sven (2012)