Browsing by author "Kwon, Hak-Yong"
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Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
Kwon, Hak-Yong; Kim, Jeon-Ho; Kim, Young-Hoon; Kim, Young-Jae; Kim, Dae-Youn; Choi, Seung-Woo; Park, Hyung-Sang; Yoo, Yong-Min; Thangaraju, Sarasvathi; Redolfi, Augusto; Travaly, Youssef; Swinnen, Bart; Beynet, Julien (2010)