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Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
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Authors
Kwon, Hak-Yong
;
Kim, Jeon-Ho
;
Kim, Young-Hoon
;
Kim, Young-Jae
;
Kim, Dae-Youn
;
Choi, Seung-Woo
;
Park, Hyung-Sang
;
Yoo, Yong-Min
;
Thangaraju, Sarasvathi
;
Redolfi, Augusto
;
Travaly, Youssef
;
Swinnen, Bart
;
Beynet, Julien
Conference
10th International Conference on Atomic Layer Deposition - ALD
Title
Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
Publication type
Proceedings paper
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