Publication:

Plasma enhanced atomic layer deposition of silicon oxide for through silicon via

Date

2010

Proceedings Paper

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Author(s)

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Kim, Young-Hoon

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Choi, Seung-Woo

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Park, Hyung-Sang

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Thangaraju, Sarasvathi

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Redolfi, Augusto

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Travaly, Youssef

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Metrics

1869 since deposited on 2021-10-18

Acq. date: 2025-12-12