Browsing by author "Grimes, Michael"

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Vapor deposited thin organic-inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies

Chery, Emmanuel; Brady-Boyd, Anita; Lin, Yuyuan; Grimes, Michael; Springer, David; Slabbekoorn, John; Walsby, Edward; Croes, Kristof; Beyne, Eric (2022-10-15)