Browsing by author "Liu, Huayu"
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Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC
Nikolsky, Peter; Davydova, Natalia; van Ingen Schenau, Koen; Van Adrichem, Paul; Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Liu, Wei; Liu, Huayu (2009-09)