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Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC
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Authors
Nikolsky, Peter
;
Davydova, Natalia
;
van Ingen Schenau, Koen
;
Van Adrichem, Paul
;
Hendrickx, Eric
;
Lorusso, Gian
;
Jiang, Jiong
;
Liu, Wei
;
Liu, Huayu
Conference
Photomask Technology 2009
Title
Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC
Publication type
Proceedings paper
Embargo date
9999-12-31
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