Browsing by author "Vakshtein, Irina"

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Diffraction based overlay metrology: accuracy and performance on front end stack

Leray, Philippe; Cheng, Shaunee; Kandel, Daniel; Adel, Mike; Marchelli, Anat; Vakshtein, Irina; Vasconi, Mauro; Salski, Bartlomiej (2008)