Browsing by author "Yamaguchi, Yoko Yamaguchi"
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Dry-etch fin patterning of a sub-22nm node SRAM cell: EUV lithography new dry etch challenges
Altamirano Sanchez, Efrain; Yamaguchi, Yoko Yamaguchi; Lindain, Jeffrey Lindain; Horiguchi, Naoto; Ercken, Monique; Demand, Marc; Boullart, Werner (2011)