Browsing by author "Shinichiro, Kawakami"

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Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control

Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark (2014)