Authors

Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark

Conference

Alternative Lithographic Technologies VI

Title

Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control

Publication type

Proceedings paper

Embargo date

9999-12-31