Browsing by author "Viva, Alessandro"
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Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition
Pasquali, Mattia; Sergeant, Stefanie; Conard, Thierry; Spampinato, Valentina; Viva, Alessandro; De Gendt, Stefan; Armini, Silvia (2021-03-06)