Browsing by author "Stokes, Harold"

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Defectivity study on dry development rinse process (DDRP)

Stokes, Harold; De Simone, Danilo; Thouroude, Yan; D'Urzo, Lucia; Sayan, Safak; Foubert, Philippe (2015)
Point-of-use filtration strategy for negative tone developer in extended immersion and extreme-ultraviolet (EUV) lithography

D'Urzo, Lucia; Foubert, Philippe; Stokes, Harold; Thouroude, Yan; Xia, A.; Wu, A. (2015)