Browsing by author "Maruyama, K."
Now showing items 1-4 of 4
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Better prediction on patterning failure mode with hotspot aware OPC modeling
Wei, Chih-I; Wu, Stewart; Deng, Yunfei; Khaira, Gurdaman; Kusnadi, I.; Fenger, G.; Kang, S.; Okamoto, Y.; Maruyama, K.; Yamaszaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner; Lorusso, Gian (2021) -
Massive e-beam metrology and inspection for analysis of EUV stochastic defect
Kang, Seulki; Maruyama, K.; Yamazaki, Z.; De Simone, Danilo; Rincon Delgadillo, Paulina; Frommhold, Andreas; Lorusso, Gian; Das, Sayantan; Halder, Sandip; Leray, Philippe (2021) -
Massive metrology of 2D logic patterns on BEOL EUVL
Das, Sayantan; Kang, S.; Halder, Sandip; Maruyama, K.; Leray, Philippe; Yamazaki, Y. (2020) -
Realizing more accurate OPC models by utilizing SEM contours
Wei, C.; Sejpal, R.; Deng, Y.; Kusnadi, I.; Fenger, G.; Oya, M.; Okamoto, Y.; Maruyama, K.; Yamazaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner (2020)