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Realizing more accurate OPC models by utilizing SEM contours
Publication:
Realizing more accurate OPC models by utilizing SEM contours
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Date
2020
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wei, C.
;
Sejpal, R.
;
Deng, Y.
;
Kusnadi, I.
;
Fenger, G.
;
Oya, M.
;
Okamoto, Y.
;
Maruyama, K.
;
Yamazaki, Y.
;
Das, Sayantan
;
Halder, Sandip
;
Gillijns, Werner
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2040
since deposited on 2021-10-29
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Acq. date: 2025-12-09
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Metrics
Views
2040
since deposited on 2021-10-29
1
last month
Acq. date: 2025-12-09
Citations