Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Realizing more accurate OPC models by utilizing SEM contours
Publication:
Realizing more accurate OPC models by utilizing SEM contours
Date
2020
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wei, C.
;
Sejpal, R.
;
Deng, Y.
;
Kusnadi, I.
;
Fenger, G.
;
Oya, M.
;
Okamoto, Y.
;
Maruyama, K.
;
Yamazaki, Y.
;
Das, Sayantan
;
Halder, Sandip
;
Gillijns, Werner
Journal
Abstract
Description
Metrics
Views
2036
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2036
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations