Browsing by author "Petersen, D.H"

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In-line resistance measurement of single nanometer-wide trenches and fins

Bogdanowicz, Janusz; Parmentier, Brigitte; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Porret, Clément; Rosseel, Erik; Hikavyy, Andriy; Hansen, Ole; Petersen, D.H; Henrichsen, H.H.; Nielsen, P.F; Vandervorst, Wilfried (2016)