In-line resistance measurement of single nanometer-wide trenches and fins

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Authors
Bogdanowicz, Janusz; Parmentier, Brigitte; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Porret, Clément; Rosseel, Erik; Hikavyy, Andriy; Hansen, Ole; Petersen, D.H; Henrichsen, H.H.; Nielsen, P.F; Vandervorst, Wilfried
Conference
ECS 230th Fall Meeting: Pacific Rim Meeting - PRiME
Title
In-line resistance measurement of single nanometer-wide trenches and fins
Publication type
Proceedings paper
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