In-line resistance measurement of single nanometer-wide trenches and fins

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Author(s)

Bogdanowicz, Janusz

;

Parmentier, Brigitte

;

Schulze, Andreas

;

;

Merckling, Clement

;

Kunert, Bernardette

;

;

Porret, Clément

;

;

Hikavyy, Andriy

;

;

;

Henrichsen, H.H.

;

;

Vandervorst, Wilfried

Metrics

1878 since deposited on 2021-10-23

Acq. date: 2025-10-29