Publication:

In-line resistance measurement of single nanometer-wide trenches and fins

Date

2016
Proceedings Paper
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMoussa, Alain
dc.contributor.authorMerckling, Clement
dc.contributor.authorKunert, Bernardette
dc.contributor.authorGuo, Weiming
dc.contributor.authorPorret, Clément
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHansen, Ole
dc.contributor.authorPetersen, D.H
dc.contributor.authorHenrichsen, H.H.
dc.contributor.authorNielsen, P.F
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.date.accessioned2021-10-23T10:08:57Z
dc.date.available2021-10-23T10:08:57Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26364
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2016-02/30/2008.abstract?sid=80731375-a7ac-4481-9572-c20733fd8bdd
dc.source.beginpage2008
dc.source.conferenceECS 230th Fall Meeting: Pacific Rim Meeting - PRiME
dc.source.conferencedate2/10/2016
dc.source.conferencelocationHonolulu, HI USA
dc.title

In-line resistance measurement of single nanometer-wide trenches and fins

dc.typeProceedings paper
dspace.entity.typePublication
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