Browsing by author "Dusco, C."

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Economical shallow emitter formation by plasma immersion ion implantation and RTA process

Pinter, Istvan; Dusco, C.; Khanh, N. Q.; Adam, M.; Makaro, Z.; Barsony, I.; Sivoththaman, Sivanarayanamoorthy; Poortmans, Jef; Adriaenssens, G. (1998)