Browsing by author "Carruthers, Mark"
Now showing items 1-1 of 1
-
Impact of backside processing on C-V characteristics of TSV capacitors in 3D stacked IC process flows
De Vos, Joeri; Stucchi, Michele; Jourdain, Anne; Beyne, Eric; Patel, Jash; Crook, Kath; Carruthers, Mark; Hopkins, Janet; Ashraf, Huma (2015)