Authors

De Vos, Joeri; Stucchi, Michele; Jourdain, Anne; Beyne, Eric; Patel, Jash; Crook, Kath; Carruthers, Mark; Hopkins, Janet; Ashraf, Huma

Conference

17th Electronics Packaging Technology Conference - EPTC

Title

Impact of backside processing on C-V characteristics of TSV capacitors in 3D stacked IC process flows

Publication type

Proceedings paper