Browsing by author "Noller, Bastian"
Now showing items 1-3 of 3
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CMP Slurries for germanium substrates in FEOL applications
Ong, Patrick; Siebert, Joerg Max; Noller, Bastian; Lan, Yongqing; Lauter, Michael; Proells, Julian; Huang, Kevin; Usman Ibrahim, Sheik Ansar (2013) -
Ge CMP process development
Ong, Patrick; Leunissen, Peter; Ansar, Sheik; Gillot, Christophe; Lan, Yongqing; Noller, Bastian; Li, Yuzhuo (2012) -
Ge, III/V Materials CMP
Ong, Patrick; Lan, Yongqing; Noller, Bastian; Gillot, Christophe; Usman Ibrahim, Ansar; Lauter, Michael; Golzarian, Reza; Li, Yuzhuo (2012)