Browsing by author "Beebe, M."
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Sputter rate variations in silicon under high k dielectric films
Benett, Joe; Vandervorst, Wilfried; Beebe, M.; Sparks, C.; Gondran, C. (2003) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004-05) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004)