Browsing by author "Collart, E.J.H."
Now showing items 1-3 of 3
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Advanced front-end processes for the 45nm CMOS technology node
Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J. (2004) -
Profile changes and self-sputtering during low energy ion implantation
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Lindsay, Richard; Collart, E.J.H.; Kirkwood, D.A.; Mathot, G.; Terwagne, G. (2002) -
Ultra-shallow junction process development for the 45nm CMOS technology node using co-implantation
Collart, E.J.H.; Kirkwood, D.; Lindsay, Richard; Vandervorst, Wilfried; Pawlak, Bartek (2004)