Authors

Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J.

Conference

E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain Engineering

Title

Advanced front-end processes for the 45nm CMOS technology node

Publication type

Oral presentation