Browsing by author "Sullivan, C."
Now showing items 1-2 of 2
-
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Baklanov, Mikhaïl; Jehoul, Christiane; Flannery, C. M.; Moguilnikov, Konstantin; Gore, R.; Gronbeck, D.; Prokopowicz, G.; Sullivan, C.; You, Y.; Pugliano, N.; Gallagher, M. (2002)