Browsing by author "Labat, Julianne"

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Variation in process conditions of porogen-based low-k films: a method to improve performance without changing existing process steps in a sub-100nm Cu damascene integration route

De Roest, David; Travaly, Youssef; Beynet, Julien; Sprey, Hessel; Labat, Julianne; Huffman, Craig; Verdonck, Patrick; Kaneko, S.; Matsushita, K.; Kobayashi, N.; Beyer, Gerald (2009)