Browsing by author "Chen, Chun-Cho"
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Manufacturability issues for application of silicides in 0.25 μm CMOS process and beyond
Wang, Qingfeng; Lauwers, Anne; Jonckx, Franky; de Potter de ten Broeck, Muriel; Chen, Chun-Cho; Maex, Karen (1996) -
Ti-salicide improvement by preamorphization for ULSI applications
Chen, Chun-Cho; Wang, Qingfeng; Jonckx, Franky; Jenq, Jyh-Shyang; Maex, Karen (1996)