Browsing by author "Keuning, W"
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Physical characterization of ALD Al2O3 films deposited on GaAs substrates
Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried; Sioncke, Sonja; Caymax, Matty; Delabie, Annelies; Heyns, Marc; Meuris, Marc; Brammertz, Guy; Van Hemmen, J.L.; Keuning, W; Kessels, W.M.M. (2008)