Browsing by author "Markvardsen, C."

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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Petersen, D.H.; Lin, R.; Hansen, T.M.; Rosseel, Erik; Vandervorst, Wilfried; Markvardsen, C.; Kjaer, D.; Nielsen, P.F. (2008)