Authors

Petersen, D.H.; Lin, R.; Hansen, T.M.; Rosseel, Erik; Vandervorst, Wilfried; Markvardsen, C.; Kjaer, D.; Nielsen, P.F.

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Publication type

Journal article

Embargo date

9999-12-31