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Articles
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
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Date
2008
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Petersen, D.H.
;
Lin, R.
;
Hansen, T.M.
;
Rosseel, Erik
;
Vandervorst, Wilfried
;
Markvardsen, C.
;
Kjaer, D.
;
Nielsen, P.F.
Journal
Journal of Vacuum Science and Technology B
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Views
1904
since deposited on 2021-10-17
2
last month
1
last week
Acq. date: 2026-01-10
Citations