Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Publication:
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Date
2008
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
17955.pdf
509.52 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Petersen, D.H.
;
Lin, R.
;
Hansen, T.M.
;
Rosseel, Erik
;
Vandervorst, Wilfried
;
Markvardsen, C.
;
Kjaer, D.
;
Nielsen, P.F.
Journal
Journal of Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1899
since deposited on 2021-10-17
Acq. date: 2025-10-25
Citations
Metrics
Views
1899
since deposited on 2021-10-17
Acq. date: 2025-10-25
Citations