Browsing by author "Cunniffe, John"
Now showing items 1-2 of 2
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Materials issues of Ni fully silicided (FUSI) gates for CMOS applications
Kittl, Jorge; Lauwers, Anne; Kmieciak, Malgorzata; Demeurisse, Caroline; Kottantharayil, Anil; Veloso, Anabela; Van Dal, Mark; Schram, Tom; Brijs, Bert; Kaiser, M.; Kubicek, Stefan; Cunniffe, John; Verbeeck, Rita; Vrancken, Christa; Biesemans, Serge; Maex, Karen (2005-05) -
Self-aligned PtSi fully silicided (FUSI) metal gates for 45 nm CMOS applications
Van Dal, Mark; Lauwers, Anne; Cunniffe, John; Verbeeck, Rita; Vrancken, Christa; Demeurisse, Caroline; Dao, T.; Tamminga, Y.; Veloso, Anabela; Kittl, Jorge; Maex, Karen (2005-05)