Authors

Van Dal, Mark; Lauwers, Anne; Cunniffe, John; Verbeeck, Rita; Vrancken, Christa; Demeurisse, Caroline; Dao, T.; Tamminga, Y.; Veloso, Anabela; Kittl, Jorge; Maex, Karen

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment

Title

Self-aligned PtSi fully silicided (FUSI) metal gates for 45 nm CMOS applications

Publication type

Proceedings paper