Publication:
Self-aligned PtSi fully silicided (FUSI) metal gates for 45 nm CMOS applications
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1934 since deposited on 2021-10-16
3last month
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Acq. date: 2026-01-10
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Views
1934 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-01-10
Citations