Browsing by author "Hinojosa, J.M."

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    • Processing of MEMS gyroscopes on top of CMOS ICs 

      Witvrouw, Ann; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Van Aerde, Steven; Ramos-Martos, J.; Ceballos, J.; Ragel, A.; Mora, J.M.; Lagos, M.A.; Arias, A.; Hinojosa, J.M.; Spengler, J.; Leinenbach, C.; Fuchs, T.; Kronmüller, S. (2005-02)