Browsing by author "Lohr, Leonhard M."
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Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
Ciesielski, Richard; Lohr, Leonhard M.; Mertens, Hans; Charley, Anne-Laure; de Ruyter, Rudi; Bogdanowicz, Janusz; Hoenicke, Philipp; Abbasirad, Najmeh; Soltwisch, Victor (2023)