Browsing by author "Wang, T. S."

Now showing items 1-1 of 1

Cluster formation during annealing of ultra-low-energy boron-implanted silicon

Collart, E. J. H.; Murrell, A. J.; Foad, M. A.; van den Berg, J. A.; Zhang, S.; Armour, D.; Goldberg, R. D.; Wang, T. S.; Cullis, A. G.; Clarysse, Trudo; Vandervorst, Wilfried (2000)