Browsing by author "Philippou, Alexander"

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Calibration and verification of a stochastic model for EUV resist

Gao, Weimin; Philippou, Alexander; Klostermann, Ulrich; Siebert, Joachim; Philipsen, Vicky; Hendrickx, Eric; Vandeweyer, Tom; Jonckheere, Rik (2012)
Impact of EUV off-axis illumination on full field imaging performance for NXE:3100

Philipsen, Vicky; Hendrickx, Eric; Philippou, Alexander; Klostermann, Ulrich; Gao, Weimin (2011)