Browsing by author "Herfurth, Norbert"
Now showing items 1-3 of 3
-
Contactless fault isolation of ultra low k dielectrics in soft breakdown condition
Herfurth, Norbert; Wu, Chen; De Wolf, Ingrid; Croes, Kristof; Boit, Christian (2018) -
New access to soft breakdown parameters of low k dielectrics through localization-based analysis
Herfurth, Norbert; Simon-Najasek, M.; Herfurth, R.; Hübner, S.; Altmann, Frank; Beyreuther, A.; Amini, E.; De Wolf, Ingrid; Wu, Chen; Croes, Kristof; Boit, Christian (2019) -
Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
Herfurth, Norbert; Wu, Chen; Beureuther, A.; Nakamura, T.; De Wolf, Ingrid; Simon-Najasek, M.; Altmann, Frank; Croes, Kristof; Boit, Christian (2019)