Browsing by author "Zhang, Yu-Ru"
Now showing items 1-1 of 1
-
Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime
Zhang, Yu-Ru; Tinck, Stefan; De Schepper, Peter; Wang, You-Nian; Bogaerts, Annemie (2015)