Authors

Zhang, Yu-Ru; Tinck, Stefan; De Schepper, Peter; Wang, You-Nian; Bogaerts, Annemie

ISSN

0734-2101

Issue

2

Journal

Journal of Vacuum Science and Technology A

Volume

33

Title

Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime

Publication type

Journal article

Embargo date

9999-12-31