Browsing by author "Chen, Luoqi"
Now showing items 1-2 of 2
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Accurate models for EUV lithography
Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Chen, Luoqi; Lui, Wei; Van Setten, Eelca; Hansen, Steve (2009) -
SLM device for 193 nm lithographic applications
Lauria, John; Albright, Ronald; Vladimirsky, Olga; Chen, Luoqi; Hoeks, Maarten; Vanneer, Roel; van Drieënhuizen, Bert; Haspeslagh, Luc; Witvrouw, Ann; Schlatmann, Bart (2008)