Browsing by author "Timmermans, Frank"
Now showing items 1-3 of 3
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Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Erdmann, Andreas; Mesilhy, Hazem; Evanschitzky, Peter; Philipsen, Vicky; Timmermans, Frank; Bauer, Markus (2020) -
Perspectives and tradeoffs of novel absorber materials for high NA EUV lithography
Erdmann, Andreas; Mesilhy, Hazem; Evanschitsky, Peter; Philipsen, Vicky; Timmermans, Frank; Bauer, Markus (2020) -
Stitching for High NA: zooming in on CDU budget
Davydova, Natalia; van Look, Lieve; Weldeslassie, Ataklti; Wiaux, Vincent; Huddleston, Laura; Slachter, Bram; Pellens, Nick; Timmermans, Frank; Wittebrood, Friso; van Setten, Eelco; Wilson, Daniel (2023)