Browsing by author "Conlan, Shona"
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Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch
Vereecke, Guy; De Coster, Hanne; Dochain, Denis; Nurekeyeva, Kunsulu; Conlan, Shona; Nsimba, Anthony; Wostyn, Kurt; Altamirano Sanchez, Efrain (2023)