Browsing by author "Gräupner, P."

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Optical solutions for contact hole lithography at the 90nm node and beyond

Köhler, C.; Elbattay, K.; Hansen, S.; Finders, Jo; Socha, R.; van den Broeke, D.; Wiaux, Vincent; Vandenberghe, Geert; Gräupner, P. (2002)