Optical solutions for contact hole lithography at the 90nm node and beyond

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Authors
Köhler, C.; Elbattay, K.; Hansen, S.; Finders, Jo; Socha, R.; van den Broeke, D.; Wiaux, Vincent; Vandenberghe, Geert; Gräupner, P.
Conference
Semicon Japan: SEMI Technology Symposium
Title
Optical solutions for contact hole lithography at the 90nm node and beyond
Publication type
Proceedings paper
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