Browsing by author "Schmidt, Michael"
Now showing items 1-4 of 4
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Clustered single wafer wet cleaning
Mertens, Paul; Holsteyns, Frank; Vos, Rita; Vereecke, Guy; Fyen, Wim; Lauerhaas, Jeff; Xu, Kaidong; Bearda, Twan; Teerlinck, Ivo; Arnauts, Sophia; Kenis, Karine; Schmidt, Michael; Heyns, Marc (2002) -
Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects
Tokei, Zsolt; Patz, Matthias; Schmidt, Michael; Iacopi, Francesca; Demuynck, Steven; Maex, Karen (2004) -
Recent advances in wafer cleaning
Mertens, Paul; Vos, Rita; Bearda, Twan; Maes, Marjan; Lauerhaas, Jeff; Loewenstein, Lee; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Xu, Kaidong; Teerlinck, Ivo; Arnauts, Sophia; Schmidt, Michael; Heyns, Marc (2001) -
Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber
Mannaert, Geert; Van Cauwenberghe, M.; Schmidt, Michael; Van Aelst, Joke; Hendrickx, Dirk; Stucchi, Michele; Conard, Thierry; Vanhaelemeersch, Serge; Boullart, Werner (2002)